The origin of negative charging in amorphous Al2O3 films: the role of native defects
![PDF] Oxygen defects in amorphous Al2O3: A hybrid functional study | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/3f768020d874f59917c72321c930e04a626b58bb/2-Figure2-1.png "PDF] Oxygen defects in amorphous Al2O3: A hybrid functional study | Semantic Scholar")
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